About: http://webisa.webdatacommons.org/52867565

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The trench is then refilled with an insulating material such as silicon dioxide derived from tetraethyl orthosilicate (TEOS) to form a field oxide region.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com