About: http://webisa.webdatacommons.org/52873475

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention also further provides an integrated test wafer for measuring pressure in a processing chamber comprising a silicon substrate having a substrate surface and including a substrate structure with no flexible diaphragm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au