About: http://webisa.webdatacommons.org/52915104

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These ultra large scale integrated circuits are fabricated by various methods including both epitaxial growth and deposition, by CVD and plasma processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr