About: http://webisa.webdatacommons.org/52995427

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereafter, a conductive film such as a titanium film, a titanium nitride film or the like is formed to fill in the contact hole 10 and to cover the upper face of the interlayer insulating film 9 by the CVD method or a sputtering method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com