About: http://webisa.webdatacommons.org/53003516

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The lower insulating film is a member corresponding to the lower SiO2 film 9 a of the first embodiment to the lower SiN film 19 a of the third embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es