About: http://webisa.webdatacommons.org/53006427

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, the trench is partially filled with a first layer of conductive material 202 which is preferably polysilicon, but could also comprise metal or any other conductive material and a pad nitride 204, such as silicon nitride, is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es