About: http://webisa.webdatacommons.org/53055009

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The selective epitaxy, in an embodiment, includes exposing a silicon surface to a gas mixture including H2 and SiH2Cl2 in a temperature range between 600-800 degrees C. In an embodiment, the selective epitaxy is a molecular beam epitaxy.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es