About: http://webisa.webdatacommons.org/53295915

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Conventional isolation of circuit components in modern integrated circuit technology takes the form of shallow trenches, which are etched into the semiconductor substrate and filled with an insulating material, such as silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com