About: http://webisa.webdatacommons.org/53432594

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, since Ti, Ni, or Si is a metal high in the reactivity to the nitride semiconductor layer, it chemically reacts with the nitride semiconductor layer to induce a defect such as a nitrogen void in the nitride semiconductor layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com