About: http://webisa.webdatacommons.org/53790037

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, in other embodiments, this layer can also be composed of a non-oxidic electrically insulating material, in particular of Si3N4 silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es