About: http://webisa.webdatacommons.org/54153268

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	n1 is an integer greater than or equal to 1, each Si is a silicon atom; X1 is a functional group able to react with a surface hydroxyl site of the dielectric material, Y1 is either:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com