About: http://webisa.webdatacommons.org/54200162

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one form the patterned passivation layer 56 is an insulating material such as Silicon Oxy Nitride, silicon nitrides, TEOS films, plasma enhanced nitrides or combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com