About: http://webisa.webdatacommons.org/54315379

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A noble metal, e.g. Pt or Ru, is grown by ALD on the substrate and then the metal layer is patterned and etched so that there is metal 54 left only on and near the barrier layer 52.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com