About: http://webisa.webdatacommons.org/54340693

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One such pickup means known in the art as a Bernoulli air pickup head employs the flow of a suitable gas, such as air or nitrogen, between the pickup head and the face of the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk