About: http://webisa.webdatacommons.org/54353672

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, a conformal liner layer, such as silicon oxide, silicon nitride or a combination thereof, may be optionally formed along the bottom and sidewalls of the deep trench 36.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr