About: http://webisa.webdatacommons.org/54391179

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A copper layer 20 is then deposited over the barrier layer 18 by conventional methods such as chemical vapor deposition (CVD), physical vapor deposition (PVD), and electroplating, to fill the openings 16.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca