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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	BACKGROUND OF THE INVENTION [0002] The advantages of using single crystal semiconductors such as silicon as a mechanical material have long been recognized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com