About: http://webisa.webdatacommons.org/54667340

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The barrier layer, if necessary, will be able to form more uniformly along the sides and bottom of the contact opening and more particularly in the corners.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com