PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The process for backgriding the wafer is a process for grinding and polishing the rear surface of the wafer W so as to make the thickness of the wafer thin.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.ca