About: http://webisa.webdatacommons.org/54986243

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The wafer is exposed to a plasma including a conductive material for forming a first layer of the conductive material over the layer of insulating material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com