About: http://webisa.webdatacommons.org/55012227

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention is particularly well-suited, however, for the fabrication of dielectric thin film layers and for filling narrow gas having high aspect ratios.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com