About: http://webisa.webdatacommons.org/55325149

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The chamber could have been used for processing operations including the deposition of a low dielectric constant (i.e. a dielectric constant less than 4.0).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com