About: http://webisa.webdatacommons.org/55360526

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The lower electrode 43, the piezoelectric film 44, and the upper electrode 45 can be formed on the substrate 41 by a film forming method such as sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com