About: http://webisa.webdatacommons.org/55623904

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method for forming a shallow trench with tapered profile and round corners for the application of shallow trench isolation (STI).
http://www.w3.org/ns/prov#wasQuotedFrom	google.es