About: http://webisa.webdatacommons.org/55704889

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Upper barrier layer film 35 may be formed using sputtering techniques, or chemical vapor deposition or other deposition processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com