About: http://webisa.webdatacommons.org/55917638

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequent processing steps such as passivation and multi-layer interconnection increases the reaction between the aluminum and the silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com