About: http://webisa.webdatacommons.org/55983113

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, another is a method of directly forming a polycrystalline silicon film by a plasma CVD method using SiH4, SiF4, and H2 as material gases.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au