About: http://webisa.webdatacommons.org/56002235

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternately the trench fill material 26 can comprise BPSG, a nitride or other suitable electrically insulating material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com