About: http://webisa.webdatacommons.org/56025499

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alignment marks are usually of a simple geometrical shape such as a rectangle or a cross and are commonly etched with a relatively shallow depth into the silicon substrate of wafer (10) shown in FIG. 1a.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com