About: http://webisa.webdatacommons.org/56032110

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, the electrodes may be formed by a dry process such as a sputtering method or a vacuum evaporation method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com