| http://www.w3.org/ns/prov#value | - Alternatively, the software routines may be performed in hardware, as an application specific integrated circuit or other type of hardware implementation, or a combination of software or hardware. [0038] Barrier Layer Formation [0039]FIG. 2 illustrates a process sequence 200 for depositing a tungsten nitride layer according to one embodiment of the present invention.
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