About: http://webisa.webdatacommons.org/56123726

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, a substance such as SiO2 that never forms defects on a wafer even when it becomes attached to or accumulated on the surface of the wafer may be used as the second substance in liquid or solid form.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com