About: http://webisa.webdatacommons.org/56391809

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart illustrating an example of a user interface for operator interface server 10 used to communicate information to device interface server 18 regarding how to process a batch of wafer lots.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com