About: http://webisa.webdatacommons.org/56482994

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS is an emerging technology that is attracting significant attention in the engineering, chemistry and biology communities.
http://www.w3.org/ns/prov#wasQuotedFrom	northwestern.edu