About: http://webisa.webdatacommons.org/56492865

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	First, after a resist is formed, a region except a region in which the opening portion is to be formed is covered with a mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com