About: http://webisa.webdatacommons.org/56548183

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since the BPSG is an insulating material, the oxidation of the surface of the BPSG film is not necessary and the BPSG film is not undesirably charged electrically, as is the case with silicon trench isolation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com