About: http://webisa.webdatacommons.org/56566050

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Since the shoulders 21 of the insulating layer 20 are in a range including 45??? to the direction of the sputtering ions, the shoulders 21 receive the greatest etching and are converted to a positive slope 25.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com