About: http://webisa.webdatacommons.org/56626987

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 illustrates the results of the deposition of a layer 110 of an electrode material, such as TiN, on upper surface 104, followed by the deposition of a layer 112 the same material as dielectric spacer 88.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca