About: http://webisa.webdatacommons.org/56651547

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	With reference to FIG. 1, a semiconductor device 10 including a substrate 12 is provided, and thesurface of the semiconductor device 10 includes a pad layer 20 and a deep trench 14 defined in the substrate 12.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com