About: http://webisa.webdatacommons.org/56800422

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A rate sensor according to claim 1 wherein of the preceding claims, the vibrating element is a plate machined from a silicon substrate, and the substrate supports the second part of the tunnel pick-off.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au