About: http://webisa.webdatacommons.org/5684672

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the immersion fluid 248 is a fluid such as de-gassed, de-ionized water.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com