About: http://webisa.webdatacommons.org/56911022

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, in this embodiment, Ti is used as the contact metal, but it is acceptable to use metals such as Ta, W, Mo, Pt, etc., or silicide alloys such as TaSi, TiSi, WSi, PtSi, MoSi, etc., or alloys such as Ti-Ta, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com