About: http://webisa.webdatacommons.org/56936077

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although the embodiment is a case of applying the present invention to the ion implantation apparatus of the single wafer type, the present invention may be applied to an ion implantation apparatus of a batch type.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com