PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • As will subsequently be described, further processing steps, such as silicide formation, and the like, can also be carried out to reduce the electrical resistance of a surface portion of gate electrode 36 to facilitate contact formation, and to improve the performance of the MOSFET.
http://www.w3.org/ns/prov#wasQuotedFrom
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