About: http://webisa.webdatacommons.org/57141841

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A resist reacts with the irradiation such as light, electron beam, X-ray, ion beam or the like, and undergoes chemical changes such as changes in chemical composition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca