| http://www.w3.org/ns/prov#value | - On the ohmic contact layers 51, 52, 53, 54, 55 and 56 and the gate insulating film 30 is formed data wiring 60, 61, 62, 63, 64, 65, 66 and 67 with a thickness of 1500 to 3500 ???, which are made of a conductive material such as aluminum or its alloy, chrome or its alloy, molybdenum or its alloy, chrome nitride or molybdenum nitride, etc.
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