About: http://webisa.webdatacommons.org/57524242

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Reactive Sputtering Process Reactive sputtering may be used to deposit a TCO layer onto a substrate for such applications as solar panels and thin film transistors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com