About: http://webisa.webdatacommons.org/57895934

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic longitudinal cross sectional view showing an apparatus used for carrying out a method for forming an aluminum nitride thin film which is a preferred embodiment of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com