| http://www.w3.org/ns/prov#value | - FIG. 3A is a schematic side view illustrating a multilayer printed wiring of the sensor device, FIG. 3B is a schematic plan view illustrating a first wiring layer, FIG. 3C is a schematic plan view illustrating a second wiring layer, FIG. 3D is a schematic plan view illustrating a third wiring layer, and FIG. 3E is a schematic plan view illustrating a fourth wiring layer;
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