About: http://webisa.webdatacommons.org/57992353

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a plan view showing one example of the pattern of the electrode of an electrostatic chuck embodying the invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com